溶胶凝胶法制备LiTaO<sub>3</sub>薄膜

溶胶凝胶法制备LiTaO₃薄膜

摘要

摘要:用溶胶凝胶法在FTO导电玻璃基片上沉积LiTaO ₃薄膜，采用TG-DTA、SEM、XRD、UV-Vis光谱法分析薄膜的表面形貌、结晶性能和光学性能。结果表明，650 °C下退火的薄膜具有在(006)晶向上强烈的择优取向性，表面形貌均匀致密，薄膜裂纹减少，杂质LiTa ₃O ₈峰的半高峰宽和光学带隙 E _g明显受到薄膜结晶性能的影响，光学带隙值 E _g随着杂质LiTa ₃O ₈半高峰宽的降低而增加，LiTaO ₃薄膜的光学带隙 E _g蓝移从3.87 eV增加到3.91 eV。

Abstract:LiTaO ₃thin films were deposited on FTO conductive glass substrates by sol-gel method. The surface morphology, crystallization and optical properties of the films were analyzed by TG-DTA, SEM, XRD and UV-Vis spectroscopy. The results show that the films annealed at 650 °C have strong preferred orientation in (006) direction, uniform surface morphology and less cracks. The half-peak width of LiTa ₃O ₈impurity peak and optical band gap E _gare obviously affected by the crystallization properties of LiTaO ₃thin films. Optical band gap E _gincreases with the decrease of half peak width of impurity LiTa ₃O ₈peak. The blue shift of the optical band gap E _gincreases from 3.87 eV to 3.91 eV.