Abstract:In this work, we report the fabrication and characterization of an MoS ₂inverter by a dry transfer method, where the inverter consists of an MoS ₂transistor and an MoS ₂resistor connected in series with graphene flakes serving as electrodes. To improve the electrical performance of the MoS ₂transistor and invertor, we utilize thermal evaporation (Au) through a stencil mask to improve the contact quality between the graphene electrodes and metal electrodes on the substrate. Upon such enhancement, we find that the MoS ₂transistor exhibits an I _ON/ I _OFF> 10 ⁵; the MoS ₂inverter shows a typical logic-conversion feature with voltage gain > 6. Our work demonstratesthat the dry transfer technique has great potential in the preparation and application of two-dimensional transistors, inverters and logic circuits.