Abstract:In order to enhance the quality factor ( Q) of micro-electro-mechanical system (MEMS) resonator, this paper proposes an energy-decoupling frame structure which is applied in an MEMS resonator for energy decoupling and Qenhancement. An aluminium nitride (AlN) piezoelectric resonator is designed to work at 30 MHz frequency ( f) in the lateral-extension mode. The resonator Qis significantly enlarged to 4.3×10 ⁴and the value of f· Qreaches to 1.29×10 ¹². The energy coupling between the resonator and the substrate is effectively reduced by controlling the resonant frequency ratio of the resonator to the frame structure in around 10:1. Both theoretical analysis and finite-element analysis (FEA) simulation show that the energy loss reduction and Qenhancement of resonator can be achieved by using the proposed structure.